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3-D Stacked Active Layers and Vertical Gate NAND Flash String with Single-Crystal Si Channel by Adopting Si/SiGe Selective Etch Process

기간

2010

참가자

Ju-Wan Lee

대회명

2010 Silicon Nanoelectronics Workshop

3-D Stacked Active Layers and Vertical Gate NAND Flash String with Single-Crystal Si Channel by Adopting Si/SiGe Selective Etch Process