Effect of post deposition annealing atmosphere on NO2 gas sensing and low-frequency noise in IGZO thin-film chemresistor gas sensor
기간
2021
참가자
Wonjun Shin
대회명
제 28회 한국반도체학술대회
Effect of post deposition annealing atmosphere on NO2 gas sensing and low-frequency noise in IGZO thin-film chemresistor gas sensor