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Extraction of Sub-Bandgap Trap Profile of Poly-Si/SiO2 interface in 3-D Stacked NAND Flash Memory cells

기간

2015

참가자

Nagyong Choi

대회명

2015 International Conference on Electronics, Information and Communication

Extraction of Sub-Bandgap Trap Profile of Poly-Si/SiO2 interface in 3-D Stacked NAND Flash Memory cells