HZO FeCap with Ultra-High 2Pr = 133 μC/cm², PZT-Level Ec (1.17MV/cm @ 6 nm), and CMWε = 9.6 @ 0 V by Adopting HfO2-TiO2-HfO2 Pseudomorphic Interlayer
기간
2025
참가자
Sangwoo Ryu, Ryun-Han Koo
대회명
IEEE International Electron Devices Meeting
HZO FeCap with Ultra-High 2Pr = 133 μC/cm², PZT-Level Ec (1.17MV/cm @ 6 nm), and CMWε = 9.6 @ 0 V by Adopting HfO2-TiO2-HfO2 Pseudomorphic Interlayer