Isotropic/anisotropic selective epitaxial growth of Si and SiGe on LOCOS patterned Si(100) substrate by Cold Wall Type UHV-CVD
기간
2002
참가자
S. H. Lim
대회명
2002 International Microprocesses and Nanotechnology Conference
Isotropic/anisotropic selective epitaxial growth of Si and SiGe on LOCOS patterned Si(100) substrate by Cold Wall Type UHV-CVD