NO2 Gas Sensing Properties of FET-type Gas Sensor with Poly-Si Used as an Embedded Micro-heater and Control-gate
기간
2023
참가자
Jinwoo Park
대회명
제 30회 한국반도체학술대회
NO2 Gas Sensing Properties of FET-type Gas Sensor with Poly-Si Used as an Embedded Micro-heater and Control-gate