Simulation Study on the Effect of Unconformal Work-function Metal Deposition on the Electrical Characteristic of Stacked-GAA MOSFET
기간
2018
참가자
Chul-Heung Kim
대회명
Korean Conference on Semiconductors
Simulation Study on the Effect of Unconformal Work-function Metal Deposition on the Electrical Characteristic of Stacked-GAA MOSFET