Super Self-Aligned Double-Gate (SSDG) MOSFETs Utilizing Oxidation Rate Difference and Selective Epitaxy
기간
1999
참가자
Jong-Ho Lee
대회명
1999 IEEE International Electron Devices Meeting
Super Self-Aligned Double-Gate (SSDG) MOSFETs Utilizing Oxidation Rate Difference and Selective Epitaxy