Unit Rrocess for 3-D integration of SAW Filters on Quartz Wafer and CMOS ICs on Si Wafer
기간
2004
참가자
Doo-Yun Chung
대회명
Proc. of The 1st international Workshop on Nanoscale Semiconductor Devices
Unit Rrocess for 3-D integration of SAW Filters on Quartz Wafer and CMOS ICs on Si Wafer