A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
저자
Gyuweon Jung et al.
저널 정보
Sensors and Actuators B: Chemical
출간연도
2021
A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing