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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Barometric Pressure Sensor with Air Pocket Integrated with MOSFETs on the Same Substrate

Home Barometric Pressure Sensor with Air Pocket Integrated with MOSFETs on the Same Substrate

Barometric Pressure Sensor with Air Pocket Integrated with MOSFETs on the Same Substrate

저자

Dongkyu Jang et al.

저널 정보

JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE

출간연도

2020

링크

https://doi.org/10.5573/JSTS.2020.20.3.305

Barometric Pressure Sensor with Air Pocket Integrated with MOSFETs on the Same Substrate