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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Effects of Buffer Layer Structure on Polysilicon Buffer LOCOS for the Isolation of Submicron Silicon

Home Effects of Buffer Layer Structure on Polysilicon Buffer LOCOS for the Isolation of Submicron Silicon

Effects of Buffer Layer Structure on Polysilicon Buffer LOCOS for the Isolation of Submicron Silicon

저자

Jong-Ho Lee et al.

저널 정보

IEEE Transactions on Electron Devices

출간연도

1998

링크

https://doi.org/10.1109/16.725249

Effects of Buffer Layer Structure on Polysilicon Buffer LOCOS for the Isolation of Submicron Silicon