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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Effects of oxygen gas in the sputtering process of the WO3 sensing layer on NO2 sensing characteristics of the FET-type gas sensor

Home Effects of oxygen gas in the sputtering process of the WO3 sensing layer on NO2 sensing characteristics of the FET-type gas sensor

Effects of oxygen gas in the sputtering process of the WO3 sensing layer on NO2 sensing characteristics of the FET-type gas sensor

저자

Yujeong Jeong et al.

저널 정보

Solid-State Electronics

출간연도

2023

링크

https://doi.org/10.1016/j.sse.2022.108563

Effects of oxygen gas in the sputtering process of the WO3 sensing layer on NO2 sensing characteristics of the FET-type gas sensor