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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Investigation of Electrical Characteristic Behavior Induced by Channel-Release Process in Stacked Nanosheet Gate-All-Around MOSFETs

Home Investigation of Electrical Characteristic Behavior Induced by Channel-Release Process in Stacked Nanosheet Gate-All-Around MOSFETs

Investigation of Electrical Characteristic Behavior Induced by Channel-Release Process in Stacked Nanosheet Gate-All-Around MOSFETs

저자

Sihyun Kim et al.

저널 정보

IEEE Transactions on Electron Devices

출간연도

2020

링크

https://doi.org/10.1109/TED.2020.2989416

Investigation of Electrical Characteristic Behavior Induced by Channel-Release Process in Stacked Nanosheet Gate-All-Around MOSFETs