Home Investigation of silicide-induced-dopant-activation for steep tunnel junction in tunnel field effect transistor (TFET)
저자
Sihyun Kim et al.
저널 정보
Solid-State Electronics
출간연도
2018
링크
https://doi.org/10.1016/j.sse.2017.10.013
Investigation of silicide-induced-dopant-activation for steep tunnel junction in tunnel field effect transistor (TFET)