Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer
저자
Wonjun Shin et al.
저널 정보
Sensors and Actuators B: Chemical
출간연도
2020
Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer