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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Patterning of Si nanowire array with electron beam lithography for sub-22 nm Si nanoelectronics technology

Home Patterning of Si nanowire array with electron beam lithography for sub-22 nm Si nanoelectronics technology

Patterning of Si nanowire array with electron beam lithography for sub-22 nm Si nanoelectronics technology

저자

Min-Chul Sun et al.

저널 정보

Microelectronic Engineering

출간연도

2013

링크

https://doi.org/10.1016/j.mee.2013.03.023

Patterning of Si nanowire array with electron beam lithography for sub-22 nm Si nanoelectronics technology