Home Si adatom diffusion on Si (100) surface in selective epitaxial growth of Si
저자
Seung-Hyun Lim et al.
저널 정보
Journal of Vacuum Science and Technology B
출간연도
2003
링크
https://doi.org/10.1116/1.1621656
Si adatom diffusion on Si (100) surface in selective epitaxial growth of Si
