Home Ultrathin oxide grown on polysilicon by ECR (Electron Cyclotron Resonance) N2O plasma
저자
Sangyeon Han et al.
저널 정보
Journal of the Korean Physical Society
출간연도
2000
링크
https://doi.org/10.1109/PPID.2000.870640
Ultrathin oxide grown on polysilicon by ECR (Electron Cyclotron Resonance) N2O plasma
