Home Ultrathin Polyoxide Grown by Electron Cyclotron Resonance N2O Plasma
저자
Sangyeon Han et al.
저널 정보
Electronics Letters
출간연도
2000
링크
https://doi.org/10.1049/el:20000307
Ultrathin Polyoxide Grown by Electron Cyclotron Resonance N2O Plasma