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Research

Gas Sensor & Bio Sensor

MOSFET Type Gas Sensor

Based on MOSFET having a horizontal floating gate

CMOS compatible, detecting various gases

Higher sensitivity than previous FET gas sensor


Device Modeling
Gas Sensing Characteristics

Measurement Condition Temperature : 180°C Gas concentrations : NO2 (1 ~ 50 ppm)

Gas Sensing Characteristics Threshold Voltage Shift (right direction) Drain Current Increase (PMOSFET) Response Time : 45 s Recovery Time : 300 s