Design and Optimization of Triple-k Spacer Structure in Two-Stack Nanosheet FET From OFF-State Leakage Perspective
저자
Donghyun Ryu et al.
저널 정보
IEEE Transactions on Electron Devices
출간연도
2020
Design and Optimization of Triple-k Spacer Structure in Two-Stack Nanosheet FET From OFF-State Leakage Perspective