Device Design of p+/n+ and n+/p+/n+ Gate Bulk Fin Field Effect Transistors with Source/Drain to Gate Underlap for Sub-40 nm Dynamic Random Access Memory Cell Transistors
저자
Ki-Heung Park et al.
저널 정보
Japanese Journal of Applied Physics
출간연도
2009
Device Design of p+/n+ and n+/p+/n+ Gate Bulk Fin Field Effect Transistors with Source/Drain to Gate Underlap for Sub-40 nm Dynamic Random Access Memory Cell Transistors