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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home n+/p+ gate bulk FinFETs with locally separated channel structure for sub-50-nm DRAM cell transistors

Home n+/p+ gate bulk FinFETs with locally separated channel structure for sub-50-nm DRAM cell transistors

n+/p+ gate bulk FinFETs with locally separated channel structure for sub-50-nm DRAM cell transistors

저자

Han-A-Reum JUNG et al.

저널 정보

IEEE Electron Device Letters

출간연도

2007

링크

https://doi.org/10.1109/LED.2007.909870

n+/p+ gate bulk FinFETs with locally separated channel structure for sub-50-nm DRAM cell transistors