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서울대학교 이종호 교수님 연구실Semiconductor Materials and Devices Laboratory

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Home Threshold Voltage Behavior of Body-Tied FinFET(OMEGAMOSFET) with Respect to Ion Implantation Conditions

Home Threshold Voltage Behavior of Body-Tied FinFET(OMEGAMOSFET) with Respect to Ion Implantation Conditions

Threshold Voltage Behavior of Body-Tied FinFET(OMEGAMOSFET) with Respect to Ion Implantation Conditions

저자

Tai-su Park et al.

저널 정보

JapaneseJournalofAppliedPhysics

출간연도

2004

링크

https://doi.org/10.1143/JJAP.43.2180

Threshold Voltage Behavior of Body-Tied FinFET(OMEGAMOSFET) with Respect to Ion Implantation Conditions